许威

办公室:致腾楼1016

E-mail:weixu@szu.edu.cn

电话:0755-26534853; +86-18928410278

学术主页:https://www.researchgate.net/profile/Wei_Xu163


许威,博士,美国物理学会会员,深圳市孔雀计划海外高层次人才。2010年和2013年毕业于华中科技大学,获工学学士与工学硕士学位。2017年毕业于香港科技大学,获哲学博士学位,后于香港科技大学集成微系统MEMS实验室担任副研究员。2018年加入深圳大学电子与信息工程学院任助理教授。研究方向主要包括CMOS MEMS热式流速、加速度、温湿度传感器及其智能传感融合系统,微/纳米制造技术,微/纳流体器件等领域。主持和参与了高档数控国家科技重大专项、HKUST-MIT超大联合项目,广东省自然科学基金面上项目,孔雀计划科研项目等多项课题。近年来,在国际重要SCI期刊IEEE TIE, IEEE J-MEMS, IEEE SENS J, JMM等以及顶级国际会议IEEE MEMS, IEEE Transducers和IEEE Sensors等发表论文40余篇,其中两篇JMEMS论文获选JMEMS-RightNow论文,一篇IEEE MEMS 2020会议论文获杰出论文奖(全球仅三篇)。

二、主要研究方向

集成CMOS MEMS传感器及智能传感融合系统

微电化学传感器

柔性与高线性度的微型压力与剪切力传感器机理及其器件

三、代表性论文

期刊论文(遴选)

1.      Wei Xu#, Xiaoyi Wang, Ruijie Wang, Izhar, Jingcui Xu, Yi-Kuen Lee#; CMOS MEMS Thermal Flow Sensor with Enhanced Sensitivity for HVAC Application, IEEE Transactions on Industrial Electronics, In press, 2020. #共同通讯.

2.      Wei Xu#, Xiaoyi Wang, Xu Zhao, Izhar, Yi-Kuen Lee#, Two-Dimensional CMOS MEMS Thermal Flow Sensor with High Sensitivity and Improved Accuracy, IEEE/ASME Journal of Microelectromechanical Systems, vol. 29, no. 2, pp. 248-254, 2020. #共同通讯, Highlighted as JMEMS RightNow Paper.

3.      Wei Xu, Xiaoyi Wang, Yi Chiu, Yi-Kuen Lee, “High Sensitivity and Wide Dynamic Range Thermoresistive Micro Calorimetric Flow Sensor with CMOS MEMS Technology,” IEEE Sensors Journal, vol. 20, no.8, pp. 4104-4111, 2020.

4.      Wei Xu, Bo Gao, Shenhui Ma, Yi Chiu, and Yi-Kuen Lee, “A CMOS-MEMS Thermoresistive Micro Calorimetric Flow Sensor with Temperature Compensation,” IEEE/ASME Journal of Microelectromechanical Systems, vol. 28, no. 5, pp. 841-849, 2019.

5.      W. Xu, K. Song, S. Ma, B. Gao, Y. Chiu and Y. K. Lee, “Theoretical and Experimental Investigations of Thermoresistive Micro Calorimetric Flow Sensors Fabricated by CMOS MEMS Technology,” IEEE/ASME Journal of Microelectromechanical Systems, vol. 25, no. 5, pp. 954-962, Oct. 2016. Highlighted as JMEMS RightNow Paper.

会议论文(遴选)

1.      W. Xu#, R. Wang, X. Wang, B. Mousa, and Y. K. Lee#, “An Integrated CMOS MEMS Gas Flow Sensor with Detection Limit Towards Micrometer Per Second,” in IEEE 33th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2020), Vancouver, Canada, 2020, pp. 200-203. #共同通讯, (杰出论文奖)

2.      X. Wang, X. Zhao, H. Luo, W. Xu#, and Y. K. Lee#, “A Coriolis Force Compensated Micro Thermal Convective Accelerometer with Low Crossing Effect,” in IEEE 33th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2020), Vancouver, Canada, 2020, pp. 255-258. #共同通讯, (Oral Presentation).

3.      W. Xu#, X. Wang, B. Mousa, M. Paszkiewicz, and Y. K. Lee#, “Self-heated Thermoresistive Flow Sensor Coated with Parylene-C for Reliability Enhancement by using 0.35μm CMOS MEMS Technology,” in IEEE 20th International Conference on Solid-State Sensors, Actuators and Microsystem (IEEE Transducers’19), Berlin, Germany, 2019, pp. 1913-1916. #共同通讯

4.      W. Xu, M. Duan, M. Ahmed, S. Mohamad, A. Bermak, and Y. K. Lee, “A Low Cost Micro BTU Sensor System Fabricated by CMOS MEMS Technology”, in The 19th International Conference on Solid-State Sensors, Actuators and Microsystem (Transducers’17), Kaohsiung, Taiwan, Jun 18-22, 2017, pp. 406-409. (Oral Presentation)

5.      W. Xu, B. Gao, S. Ma, A. Zhang, Y. Chiu, and Y. K. Lee, “Low-cost Temperature-Compensated Thermoresistive Micro Calorimetric Flow (T2MCF) Sensor by Using 0.35µm CMOS MEMS Technology,” in 29th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2016), Shanghai, China, Jan. 2016, pp. 189-192. (Oral Presentation)