Journal Papers (*Corresponding Author, 按发表年份排列，遴选)
F. Wang, X. Ouyang, L. Hong, X. Song, and W. Xu*, “A Monolithic CMOS-MEMS SoC with 1.8 mm/s and 2 mK Resolution for Flow and Temperature Sensing via a Microcantilever Array,” Microsystems & Nanoengineering, vol. 12, pp. 106, 2026.
X. Song, L. Huang, L. Hong, B. Wang, X. Pan and W. Xu*, "A Single-Chip Pulse-Driven CMOS-MEMS Flow Sensing System with Sub-mm/s Flow Detection Limit," IEEE Transactions on Circuits and Systems I: Regular Papers, vol. 73, no. 1, pp. 51-59, Jan. 2026.
J. Huang, X. Song, W. Chen, X. Wang, Y. K. Lee and W. Xu*, “On‑Chip MEMS Platform for in‑Situ Thermal Characterization of CMOS Thin‑Films,” Chip, Article 100191, 2026.
L. Hong, K. Xiao, X. Song, L. Lin, and W. Xu*, “System-level modeling with temperature compensation for a CMOS-MEMS monolithic calorimetric flow sensing SoC” Microsystems & Nanoengineering, vol. 11, no. 1, pp. 13, 2025.
K. Xiao, W. He, Y. Wang, and W. Xu*, "A Flexible Thermal Flow Sensor Based on Electrochemical Impedance: Design Methodology and Implementation," IEEE Transactions on Instrumentation and Measurement, vol. 74, Art no. 7503609, 2025.
H. Luo, Y. Yin, M. Huang, R. Xu, X. Song, and W. Xu*, "A Single-Pulse Actuated Micro Flow Sensor With Thermal Feedback and Digitally Controlled Power Distribution," IEEE Transactions on Instrumentation and Measurement, vol. 75, pp. 9514408, 2026.
W. Xu, Z. Li, Z. Fang, B. Wang, L. Hong, G. Yang, S. T. Han, X. Zhao, and X. Wang, "A Sub-5mW Monolithic CMOS-MEMS Thermal Flow Sensing SoC with ±6m/s Linear Range," IEEE Journal of Solid-State Circuits (JSSC，集成电路领域顶刊), vol. 59, no. 5, pp. 1486-1496, 2024.
X. Song, L. Huang, Y. Lin, L. Hong, and W. Xu*, "Surface Micromachined CMOS-MEMS Pirani Vacuum Gauge with Stacked Temperature Sensor," IEEE Journal of Microelectromechanical Systems, vol. 33, no. 2, pp. 274-281, 2024. (Highlighted as JMEMS RightNow Paper)
M. Huang, H. Luo, X. Song, R. Xu, L. Hong, and W. Xu*, "Micro Flow Sensor With High Sensitivity and Resolution Based on Thermal Feedback and Digitized Power Distribution," IEEE Transactions on Industrial Electronics, vol. 72, no. 6, pp. 6539-6546, 2025.
W. Xu, L. Hong, X. Pan and Izhar, "Monolithically Integrated Bidirectional Flow Sensor and Stacked Temperature/Humidity Sensor Based on CMOS-Compatible MEMS Technology," IEEE Transactions on Instrumentation and Measurement, vol. 73, pp. 7501609, 2024.
W. Xu, X. Wang, Z. Ke, and Y. K. Lee, “Bidirectional CMOS-MEMS Airflow Sensor with sub-mW Power Consumption and High Sensitivity,” IEEE Transactions on Industrial Electronics, vol. 69, no. 3, pp. 3183-3192, 2022.
W. Xu, X. Wang, R. Wang, J. Xu, and Y. K. Lee*, “CMOS MEMS Thermal Flow Sensor with Enhanced Sensitivity for HVAC Application,” IEEE Transactions on Industrial Electronics, vol. 68, no. 5, pp. 4468-4476, 2021.
W. Xu, X. Wang, X. Zhao, Y. Yang, and Y. K. Lee, “Determination of Thermal Conductivities for Thin-Film Materials in CMOS MEMS Process,” IEEE Transactions on Instrumentation and Measurement, vol. 70, pp. 6001309, 2021.
W. Xu, X. Wang, X. Zhao, and Y. K. Lee, “Two-Dimensional CMOS MEMS Thermal Flow Sensor with High Sensitivity and Improved Accuracy,” IEEE Journal of Microelectromechanical Systems, vol. 29, no. 2, pp. 248-254, 2020. (Highlighted as JMEMS RightNow Paper)
W. Xu, K. Song, S. Ma, B. Gao, Y. Chiu and Y. K. Lee, “Theoretical and Experimental Investigations of Thermoresistive Micro Calorimetric Flow Sensors Fabricated by CMOS MEMS Technology,” IEEE Journal of Microelectromechanical Systems, vol. 25, no. 5, pp. 954-962, Oct. 2016 (Highlighted as JMEMS RightNow Paper)
Peer-reviewed Conference Papers (*Corresponding Author, 按发表年份排列，遴选)
Y. Ma, L. Hong, X. Song, H. Hu, and W. Xu*, "Monolithic CMOS-MEMS Thermal Conductivity Detector with On-Chip Integrated Microchannel for Rapid and Flow-Insensitive Gas Identification," IEEE 39th International Conference on Micro Electro Mechanical Systems (MEMS), Salzburg, Austria, 2026, pp. 54-57. (Oral)
J. Huang, X. Song, L. Hong, H. Hu, and W. Xu*, "MEMS-IC Co-Design and Experimental Demonstration of a Surface Micromachined CMOS-MEMS Pirani Vacuum Gauge," IEEE 39th International Conference on Micro Electro Mechanical Systems (MEMS), Salzburg, Austria, 2026, pp. 1014-1017.
Y. Zhang, L. Hong, X. Pan, and W. Xu*, "Respiratory Monitoring and State Classification via CNN–Transformer Deep Learning on a MEMS Multi-Sensor Chip," IEEE 39th International Conference on Micro Electro Mechanical Systems (MEMS), Salzburg, Austria, 2026, pp. 592-595.
H. Hu, W. Xiao, K. Xiao, and W. Xu*, "Monolithically Integrated Flexible Multi-Sensor for Flow, Temperature, and Conductivity Measurement in Ionic Solutions," The 23rd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Orlando, FL, USA, 2025, pp. 590-593. (Oral)
Y. Ma, L. Hong, R. Xu, M. Jia, and W. Xu*, "Stacked Temperature and Humidity SOC with Enhanced Sensitivity and low Hysteresis via CMOS-MEMS Integration," The 23rd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Orlando, FL, USA, 2025, pp. 695-698. (Oral)
K. Xiao, X. Song, M. Duan, and W. Xu*, “An Ultralow-Power Flexible Thermal Flow Sensor Based on Electrochemical Impedance” Transducers, pp. 694-697, 2023. (Oral)
X. Song, K. Xiao, and W. Xu*, “A Low Power and Ultrathin Flexible Shear Stress Sensor with High Sensitivity Suspended Over a Flexible Substrate” Transducers, pp. 306-309, 2023. (Oral)
L. Huang, Izhar, X. Zhou, M. Fang, S. Huang, Y. K. Lee, X. Pan, and W. Xu*, "A real-time wireless calorimetric flow sensor system with a wide linear range for low-cost respiratory monitoring," IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS), Munich, pp. 107-110, 2023. (Best Paper Award Nominee)
Z. Li, Z. Fang, B. Wang, M. Ahmed, X. Pan, S. T. Han, X. Zhao, and W. Xu*, “System-Level Modeling and Design of a Temperature Compensated CMOS MEMS Thermal Flow Sensor,” IEEE International Symposium on Circuits and Systems, pp. 2072-2076, 2022. (Best Paper Award Nominee)
X. Xu, Z. Fang, J. Zheng, B. Gao, and W. Xu*, “Theoretical and experimental studies of electrochemical impedance based micro calorimetric flow sensor,” The 21th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), pp. 1223-1226, 2021.
X. Wang, Y. Guo, X. Zhao, W. Xu*, “A Bidirectional CMOS MEMS Thermal Wall Shear Stress Sensor with Improved Sensitivity and Low Power Consumption,” IEEE 34rd International Conference on Micro Electro Mechanical Systems (MEMS), pp. 131-134, 2021. (Oral)
Z. Fang, X. Xu, J. Zheng, L. Zhang, Y. Yang, and W. Xu*, “Micro Thermal Flow Sensor for Ion Solution Based on The Monitoring of Slope of Impedance Changes,” IEEE 34rd International Conference on Micro Electro Mechanical Systems (MEMS), in press, 2021. (Oral)
W. Xu*, X. Wang, X. Zhao, Z. Ke, and Y. K. Lee*, “An Integrated CMOS Mems Gas Flow Sensor with Detection Limit Towards Micrometer Per Second,” IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS), Vancouver, Canada, pp. 200-203, 2020. (MEMS顶会， Best Paper Award，全球仅三篇)
W. Xu, M. Duan, M. Ahmed, S. Mohamad, A. Bermak, and Y. K. Lee, “A Low Cost Micro BTU Sensor System Fabricated by CMOS MEMS Technology”, The 19th International Conference on Solid-State Sensors, Actuators and Microsystem (Transducers), Kaohsiung, Taiwan, Jun 18-22, 2017, pp. 406-409. (Oral)
W. Xu, B. Gao, S. Ma, A. Zhang, Y. Chiu, and Y. K. Lee, “Low-cost Temperature-Compensated Thermoresistive Micro Calorimetric Flow (T2MCF) Sensor by Using 0.35µm CMOS MEMS Technology,” IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS), Shanghai, China, Jan. 2016, pp. 189-192. (Oral)
